JPS58109559U - バキユ−ムコントロ−ラ - Google Patents

バキユ−ムコントロ−ラ

Info

Publication number
JPS58109559U
JPS58109559U JP568782U JP568782U JPS58109559U JP S58109559 U JPS58109559 U JP S58109559U JP 568782 U JP568782 U JP 568782U JP 568782 U JP568782 U JP 568782U JP S58109559 U JPS58109559 U JP S58109559U
Authority
JP
Japan
Prior art keywords
vacuum controller
membrane
slope
receiving part
contact plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP568782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS632604Y2 (en]
Inventor
関　定雄
勝治 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyosan Denki Co Ltd
Original Assignee
Kyosan Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyosan Denki Co Ltd filed Critical Kyosan Denki Co Ltd
Priority to JP568782U priority Critical patent/JPS58109559U/ja
Publication of JPS58109559U publication Critical patent/JPS58109559U/ja
Application granted granted Critical
Publication of JPS632604Y2 publication Critical patent/JPS632604Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP568782U 1982-01-21 1982-01-21 バキユ−ムコントロ−ラ Granted JPS58109559U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP568782U JPS58109559U (ja) 1982-01-21 1982-01-21 バキユ−ムコントロ−ラ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP568782U JPS58109559U (ja) 1982-01-21 1982-01-21 バキユ−ムコントロ−ラ

Publications (2)

Publication Number Publication Date
JPS58109559U true JPS58109559U (ja) 1983-07-26
JPS632604Y2 JPS632604Y2 (en]) 1988-01-22

Family

ID=30018483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP568782U Granted JPS58109559U (ja) 1982-01-21 1982-01-21 バキユ−ムコントロ−ラ

Country Status (1)

Country Link
JP (1) JPS58109559U (en])

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48110540U (en]) * 1972-03-29 1973-12-19
JPS5663855U (en]) * 1979-10-23 1981-05-29

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48110540U (en]) * 1972-03-29 1973-12-19
JPS5663855U (en]) * 1979-10-23 1981-05-29

Also Published As

Publication number Publication date
JPS632604Y2 (en]) 1988-01-22

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